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Patterned Sapphire Substrate(PSS)

Specific Information
GaN epi-layer grown on PSS produces epitaxial lateral and less interstitial defects between GaN and sapphire substrates.Moreover the lattice parameters of PSS are better matched to GaN and the epitaxial growth of GaN on PSS generates less densities of dislocations and refractive index mismatch,thereby improving the quality of epitaxy.
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  • specification
  • Properties
  • ItemPatterned Sapphire Substrate(2~6inch)
    Diameter50.8 ± 0.1 mm100.0 ± 0.2 mm150.0 ± 0.3 mm
    Thickness430 ± 25μm650 ± 25μm1000 ± 25μm
    Surface OrientationC-plane (0001) off-angle toward M-axis (10-10) 0.2 ± 0.1°
    C-plane (0001) off-angle toward A-axis (11-20) 0 ± 0.1°
    Primary Flat OrientationA-Plane (11-20) ± 1.0°
    Primary Flat Length16.0 ± 1.0 mm30.0 ± 1.0 mm47.5 ± 2.0 mm
    R-Plane9-o'clock
    Front Surface FinishPatterned
    Back Surface FinishSSP:Fine-ground,Ra=0.8-1.2um; DSP:Epi-polished,Ra<0.3nm
    Laser MarkBack side
    TTV≤8μm≤10μm≤20μm
    BOW≤10μm≤15μm≤25μm
    WARP≤12μm≤20μm≤30μm
    Edge Exclusion≤2 mm
    Pattern SpecificationShape StructureDome, Cone,Pyramid
    Pattern Height1.6~1.8μm
    Pattern Diameter2.75~2.85μm
    Pattern Space0.1~0.3μm


    Customization specifications:

    * Nanometer patterned sapphire substrate(NPSS).

    * Sapphire PSS of various orientations.


  • Patterned sapphire substrate(PSS) is a process of making some specific micrometer pattern like Dome,Cone or Pyramid-shaped on the sapphire substrate.Uneven patterns on sapphire substrates can generate light scattering or refraction,thereby improving the luminous efficiency. 


    Crystal StructureHexagonal
    Lattice Constant(nm)a=4.76Å c=12.99Å
    Density(g/cm3)3.98
    Melting point(℃)2040
    Mohs Hardness(mohs)9
    Dielectric Constant9.3(A plane) 11.5(C plane)
    Thermal Conductivity(W/cm.K)0.46
    Thermal Expansion 6.7*10-6/k(C plane)             5.0*10-6/k(A plane)
    Refractive Index 1.762-1.777
    Transmission Test sample:Sapphire:D76.2*4mm
    UV:200~380nm  74%~84%
    Visible light:380~760nm  85% 
    Infrared:760~1000nm      85%
    Far-Infrared:>1000nm   80%~100%


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