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Quartz Wafers–Technical Overview

published on 2025-08-18

Material: High-purity fused quartz (SiO₂)
Applications: Semiconductors, precision optics, UV lithography, spectroscopy, laser systems, high-temperature processing


1. Optical Properties

Parameter Typical Value Notes / Applications
Wavelength Range 190–2500 nm Deep UV to near-infrared
Transmittance @ 200 nm >80% UV optics, spectroscopy
Transmittance 260–2000 nm >90% Visible to near-IR applications
Surface Quality (S/D) 40/20 – 20/10 Optical-grade wafers for coating or laser systems
Refractive Index 1.458–1.460 (at 589 nm) Stable across temperature and wavelength
Bubble / Inclusion Level Minimal / None visible Critical for high-precision optics
Notes: Quartz wafers maintain excellent transmission in the deep UV (<260 nm), outperforming ordinary glass for UV lithography and laser applications.


2. Chemical Properties

Parameter Typical Value Notes / Applications
Material Composition >99.99% SiO₂ High-purity fused quartz
Acid Resistance Excellent (except HF) Semiconductor wet etching, chemical labware
Alkali Resistance Excellent Maintains optical clarity in basic solutions
Oxidation Resistance High Suitable for high-temperature and oxidative environments
Notes: Quartz wafers act as a chemically stable barrier, preserving optical and mechanical integrity under harsh conditions.


3. Purity and Impurity Control

Parameter Typical Value Notes / Applications
Metal Impurities <1 ppm (Na, K, Fe) Ultra-pure quartz minimizes ionic contamination in IC fabrication
High-Temperature Ion Stability No mobile ion release Critical for semiconductor and optical fiber manufacturing
Manufacturing Process Chloride refining + high-temperature purification Ensures ultra-low contamination and stable optical properties
 


4. Thermal Properties

Parameter Typical Value Notes / Applications
Coefficient of Thermal Expansion (CTE) ~5.5×10⁻⁷/K Excellent thermal shock resistance
Softening Point ~1665 °C High-temperature furnace applications
Maximum Continuous Operating Temperature 1100 °C Suitable for high-temperature optics, laser windows
Thermal Conductivity ~1.38 W/m·K Reduces temperature gradient stress
Notes: Quartz wafers remain dimensionally stable and mechanically robust under high thermal loads, unlike ordinary glass.


5. Typical Surface & Geometrical Specifications

Parameter Standard Values
Diameter Tolerance ±0.01 mm (or better)
Thickness Tolerance ±0.01 mm (or better)
Total Thickness Variation (TTV) ≤5 µm for high-end optics
Warp / Bow ≤25 µm typical
Edge Chamfer Standard 0.2–0.5 mm, reduces breakage risk
Surface Roughness (Ra) ≤0.5 nm
 

6. Summary of Key Advantages

Ultra-wide spectral transmittance: Deep UV to near-IR
Exceptional chemical stability: Resistant to acids (except HF) and oxidation
High purity: Minimizes ionic contamination for microelectronics
Thermal stability: Low CTE, high softening point, excellent shock resistance
Precision processing: Tight geometrical and surface tolerances for advanced optics


7. Customization and Supply

Diameter, thickness, and surface finish can be tailored to customer specifications
High-volume supply with batch consistency and full testing reports
Supports optical windows, UV lithography, laser optics, semiconductor substrates, and high-temperature applications
Conclusion: Selecting high-quality quartz wafers ensures optical clarity, chemical robustness, and thermal stability, providing reliable performance in advanced manufacturing and research applications.
 

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